TY - JOUR A2 - Lou, Zhichao AU - Zhang, Zhenrong AU - Wen, Huanfei AU - Li, Liangjie AU - Pei, Tao AU - Guo, Hao AU - Li, Zhonghao AU - Tang, Jun AU - Liu, Jun PY - 2022 DA - 2022/08/12 TI - Developments of Interfacial Measurement Using Cavity Scanning Microwave Microscopy SP - 1306000 VL - 2022 AB - In the field of materials research, scanning microwave microscopy imaging has already become a vital research tool due to its high sensitivity and nondestructive testing of samples.文章中,除微波成像的广泛应用外,还审查微波成像的主要理论和基本构件与其通过测量二电常量和传导性间接判定物性,微波显微镜现在允许直接调查半导体设备、电磁场和铁电域本文回顾了最近在分辨率和操作频率领域扫描微波显微镜方面的进展,并介绍了对未来可能的工业和学术应用的讨论SN-0161-0457UR-https://doi.org/101155/2022/1306000DO-10.1155/2022/1306000JF-扫描PB-HindawiKW-ER